Fabrication of <i>a</i>-Si: H/<i>a</i>-AIO Superlattice by Excimer Laser MOCVD
                    
                        
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منابع مشابه
Excimer laser fabrication of polymer microfluidic devices
Silicon has been a primary material for fabrication of microelectromechanical systems ~microfluidic devices in MEMS! for several decades. This is due to the fact that the MEMS techniques were derived from those used for microfabrication in the semiconductor industry. These techniques are well developed, and can be readily applied for silicon based MEMS fabrication. Nowadays, alternative manufac...
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AlGaN/GaN high electron mobility transistor (HEMT) hetero-structures were grown on the 2-in Si (1 1 1) substrate using metalorganic chemical vapor deposition (MOCVD). Low-temperature (LT) AlN layers were inserted to relieve the tension stress during the growth of GaN epilayers. The grown AlGaN/GaN HEMT samples exhibited a maximum crack-free area of 8mm 5mm, XRD GaN (0 0 0 2) full-width at half-...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1990
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.110.12_729